Nanotechnology is the creation of useful materials, devices and systems control/manipulation of matter on the nanometer length scale and exploitation of novel phenomena and properties which arise because of the nanometer length scale. Creation of nanoscale building blocks with various sizes and shapes are critical for the progress of nanotechnology. This work presents a detailed study of SiC nanowire synthesis by chemical vapor deposition on silicon substrate. Silicon carbide nanowires attract interest due to their applications in optoelectronic devices, sensors, and high-power/high temperature electronics.